Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

✍ Scribed by Jae-Sung Park; Chu, L.L.; Oliver, A.D.; Gianchandani, Y.B.

• Book ID: 118010995
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 275 KB
• Volume: 10
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/84.925774