This paper deals with experimental design applied to response surface methodology (RSM) in order to determine the influence of the discharge conditions on preferred c-axis orientation of sputtered AlN thin films. The thin films have been deposited by DC reactive magnetron sputtering on Si (1 0 0) su
โฆ LIBER โฆ
Behind the Mask of Method: Political Orientation and Constitutional Interpretive Preferences
โ Scribed by Joshua R. Furgeson; Linda Babcock; Peter M. Shane
- Publisher
- Springer
- Year
- 2008
- Tongue
- English
- Weight
- 240 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0147-7307
No coin nor oath required. For personal study only.
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