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Behaviour of turbomolecular pumps at high pressures

✍ Scribed by K.-H. Steinheimer; F. Werlich

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 329 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)90172-f

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