✦ LIBER ✦

Behavioral modeling of microelectromechanical systems (MEMS) with statistical performance-variability reduction and sensitivity analysis

✍ Scribed by Dewey, A.; Ren, H.; Zhang, T.

Book ID: 118749099
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 200 KB
Volume: 47
Category: Article
ISSN: 1057-7130
DOI: 10.1109/82.821550

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