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Behavior of electromigration-induced gaps in a layered Al line observed by in situ sideview transmission electron microscopy

✍ Scribed by Okabayashi, H.; Kitamura, H.; Komatsu, M.; Mori, H.


Book ID
121738143
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
441 KB
Volume
68
Category
Article
ISSN
0003-6951

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