Behavior of organochlorine impurities in
Behavior of organochlorine impurities in the process of plasma-enhanced synthesis of trichlorosilane
β
A. V. Gusev; R. A. Kornev; A. Yu. Sukhanov
π
Article
π
2008
π
SP MAIK Nauka/Interperiodica
π
English
β 167 KB