Behavior and mechanism of wide terrace formation during metalorganic vapor phase epitaxy of GaAs and related materials

✍ Scribed by Masanori Shinohara; Masafumi Tanimoto; Haruki Yokoyama; Naohisa Inoue

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 548 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91037-5