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Beam size and collimation effects in spectroscopic ellipsometry of transparent films with optical thickness inhomogeneity

✍ Scribed by H. El Rhaleb; N. Cella; J.P. Roger; D. Fournier; A.C. Boccara; A. Zuber


Book ID
108388912
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
353 KB
Volume
288
Category
Article
ISSN
0040-6090

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