Beam processing technologies: Vol. 21, VLSI Electronics Microstructure Science Series, edited by N.G. Einspruch, S.S. Cohen and R.N. Singh (Academic Press, San Diego, 1989) pp. xii + 546, $110, ISBN 0-12-234101-5

✍ Scribed by J.A. Knapp

• Book ID: 113280953
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 352 KB
• Volume: 51
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(90)90526-z