Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrat
Beam process technologies
โ Scribed by Norman G Einspruch; Simon S Cohen; Raj N Singh
- Publisher
- Academic Press
- Year
- 1989
- Tongue
- English
- Leaves
- 550
- Series
- VLSI Electronics Microstructure Science 21
- Category
- Library
No coin nor oath required. For personal study only.
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