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Beam-induced seeded lateral epitaxy with suppressed impurity diffusion for a three-dimensional DRAM cell fabrication
✍ Scribed by Ohkura, M.; Kusukawa, K.; Sunami, H.
- Book ID
- 114535020
- Publisher
- IEEE
- Year
- 1989
- Tongue
- English
- Weight
- 823 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0018-9383
- DOI
- 10.1109/16.19934
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