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Beam current enhancement of microwave plasma ion source utilizing double-port rectangular cavity resonator

✍ Scribed by Lee, Yuna; Park, Yeong-Shin; Jo, Jong-Gab; Yang, J. J.; Hwang, Y. S.


Book ID
115468648
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
1002 KB
Volume
83
Category
Article
ISSN
0034-6748

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