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Be+ ion implantation in Ga(Al)Sb layers: radiation damage

✍ Scribed by M. Pérotin; A. Pérez; H. Luquet; L. Gouskov; A. Sabir; P. Coudray

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 406 KB
Volume: 20
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(93)90395-4

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