✦ LIBER ✦
[bd5078. Thin film preparation by plasma and low pressure CVD in a horizontal reactor: C E Morosanu and V Soltuz, Vacuum, 31 (7), 1981, 309–313
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 137 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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