Bayesian spatial defect pattern recognition in semiconductor fabrication using support vector clustering

✍ Scribed by Tao Yuan; Suk Joo Bae; Jong In Park

• Book ID: 105853779
• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 865 KB
• Volume: 51
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-010-2647-x