Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

✍ Scribed by G. Ulliac; N. Courjal; H.M.H. Chong; R.M. De La Rue

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 837 KB
• Volume: 31
• Category: Article
• ISSN: 0925-3467
• DOI: 10.1016/j.optmat.2008.03.004