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Basal Plane Stacking-Fault Related Anisotropy in X-ray Rocking Curve Widths of m-Plane GaN

✍ Scribed by McLaurin, Melvin B.; Hirai, Asako; Young, Erin; Wu, Feng; Speck, James S.


Book ID
111877167
Publisher
Institute of Pure and Applied Physics
Year
2008
Tongue
English
Weight
133 KB
Volume
47
Category
Article
ISSN
0021-4922

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## Abstract An X‐ray diffraction (XRD) technique for analyzing basal‐plane stacking faults (BSFs) is introduced and tested on GaN. The analysis considers the coexistence of multiple X‐ray broadening terms including tilt, twist, limited coherence length, and inhomogeneous strain. By measuring and fi