✦ LIBER ✦
Barrier layerless submicron aluminum-damascene interconnection using aluminum chemical vapor deposition with a new nucleation method
✍ Scribed by Tsutomu Shinzawa; Kazumi Sugai; Yoshihiro Hayashi; Tsutomu Nakajima; Shunji Kishida; Hidekazu Okabayashi; Kinji Tsunenari; Yukinobu Murao; Akiko Kobayashi; Tadaaki Yako
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 680 KB
- Volume
- 79
- Category
- Article
- ISSN
- 8756-663X
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