✦ LIBER ✦
Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD processes
✍ Scribed by O. Lühn; C. Van Hoof; W. Ruythooren; J.-P. Celis
- Book ID
- 104052007
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 941 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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