Sputtering configurations and the lumine
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Carlos Rozo; Luis F. Fonseca
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Article
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2010
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Elsevier Science
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English
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Nd-and Er-doped silicon rich oxide (SRO) thin films were prepared by rf-sputtering. Different films were obtained by changing target configurations. Al and Al 2 O 3 targets were used to obtain along with silicon rich silicon oxide (SRSO) films, Al-modified SRSO films and silicon rich aluminosilicate