✦ LIBER ✦
Band bending measurement of HfO2/SiO2/Si capacitor with ultra-thin La2O3 insertion by XPS
✍ Scribed by K. Kakushima; K. Okamoto; M. Adachi; K. Tachi; J. Song; S. Sato; T. Kawanago; P. Ahmet; K. Tsutsui; N. Sugii; T. Hattori; H. Iwai
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 577 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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