Balanceregelung für reaktives Magnetronsputtern zur optischen Großflächenbeschichtung. Balance Control for Reactive Magnetron Sputtering for Large Area Optical Coating

✍ Scribed by C. May; J. Strümpfel

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 271 KB
• Volume: 13
• Category: Article
• ISSN: 0947-076X
• DOI: 10.1002/1522-2454(200104)13:2<79::aid-vipr79>3.0.co;2-n