Back-side alignment strategy decouples process from alignment and achieves leading edge overlay performance

✍ Scribed by F.G.C. Bijnen; W.V. Buel; M. Young; X. Zhou; C. Gooch

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 631 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.209