B diffusion in Si predamaged with Si+ or Ge+ and preannealed at 200–1000°C

✍ Scribed by Masataka Kase; Yoshio Kikuchi; Yuji Kataoka; Haruhisa Mori

• Book ID: 113283655
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 737 KB
• Volume: 74
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(93)95017-y