✦ LIBER ✦

AXT counters infringement allegation

Book ID: 104366294
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 491 KB
Volume: 16
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(03)00987-6

No coin nor oath required. For personal study only.

✦ Synopsis

KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.

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