๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

AXT counters infringement allegation


Book ID
104366294
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
491 KB
Volume
16
Category
Article
ISSN
0961-1290

No coin nor oath required. For personal study only.

โœฆ Synopsis


KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.


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