✦ LIBER ✦
Automation of a Mass Flow Controller for Application in Time-Multiplex SF6+CH4 Plasma Etching of Silicon
✍ Scribed by L.L. Tezani; R.S. Pessoa; R.S. Moraes; H.S. Medeiros; C.A. Martins; H.S. Maciel; G. Petraconi Filho; M. Massi; A. S. da Silva Sobrinho
- Book ID
- 115554942
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 490 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0005-8025
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