Automatic generation of thin film process flows. II. Recipe generation, flow evaluation, and system framework

✍ Scribed by M. Zaman; E. Carlen; C. Mastrangelo

• Book ID: 126740729
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 212 KB
• Volume: 12
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/66.744534