Automatic evaluation of surface topography by cross-correlation of SEM stereo pair images

✍ Scribed by Michael Alff

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 101 KB
• Volume: 19
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/0304-3991(86)90128-2