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Automatic control of gas pressure in a vacuum system: J Lucas et al, Vacuum, 32 (5), 1982, 2572̄263

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✍ J Lucas; CS Smith; MM Meadows 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 516 KB

Automatic control of gas pressure in a vacuum system: J Lucas et al, Vacuum, 32 (5), 1982, 2572&#x0304;263