Automatic calibration of lithography simulation parameters using multiple data sets

✍ Scribed by Jeffrey Byers; Chris Mack; Richard Huang; Sven Jug

• Book ID: 114155377
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 157 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00438-0