Automatic alignment for direct step and repeat printing on silicon : G. Dubroeucq and M. Lacombat. Revue Technique Thomson-CSF 10, (4) 733 (December 1978)

• Book ID: 103278643
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 119 KB
• Volume: 19
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(79)90235-x