✦ LIBER ✦
Auger studies of chemical bonds and oxygen minimization in the interfaces between AlN and SiC thin films deposited by LPCVD
✍ Scribed by B. Aspar; R. Berjoan; C. Labatut; B. Armas
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 722 KB
- Volume
- 81
- Category
- Article
- ISSN
- 0169-4332
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