Auger electron spectroscopy of compounds in the SiTiC system Characterization of SiTiC multiphased materials obtained by CVD

✍ Scribed by M. Maline; M. Ducarroir; F. Teyssandier; R. Hillel; R. Berjoan; F.J.J. Van Loo; W. Wakelkamp

• Publisher: Elsevier Science
• Year: 1993
• Weight: 121 KB
• Volume: 286
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(93)90618-s