✦ LIBER ✦

Auger electron spectrometer

Publisher: Elsevier Science
Year: 1968
Tongue: English
Weight: 466 KB
Volume: 18
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(68)91055-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Auger electron spectrometer capable of a

Auger electron spectrometer capable of attaining a high resolution

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 72 KB

Microprocessor-controlled Auger spectrom

Microprocessor-controlled Auger spectrometer

✍ Michael D Maples; Victor C Barton 📂 Article 📅 1977 🏛 Elsevier Science ⚖ 505 KB

Evaluation of an Auger electron spectrom

Evaluation of an Auger electron spectrometer for 200 mm semiconductor defect review

✍ Fillmore, David K.; Krasinski, Harold A. 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 491 KB

Elemental and chemical microanalysis o †ered by Auger electron spectroscopy (AES) provides detailed elemental characterization of the typical Ðlms, particles and defects found in the ULSI regime. In this paper, an AES defect review tool (DRT) capable of accepting full 200 mm wafers is evaluated in a

Microcomputer-based multiplexer for perf

Microcomputer-based multiplexer for performing depth profiling with an Auger electron spectrometer. (USA)

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 279 KB

Optimisation and specification of Auger

Optimisation and specification of Auger electron spectrometers for signal-to-noise ratio performance

✍ M.P. Seah; C.P. Hunt 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 533 KB

Quantitative Auger electron spectroscopy

Quantitative Auger electron spectroscopy and electron ranges

✍ M.P. Seah 📂 Article 📅 1972 🏛 Elsevier Science 🌐 English ⚖ 238 KB