Auger and XPS characterization of a multi layered Ti–Co–Si system for self aligned silicides purposes: a stoichiometry and chemical investigation

✍ Scribed by Stefano G. Alberici; Alessandro Giussani; Enrica Ravizza

• Book ID: 103843122
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 192 KB
• Volume: 114-115
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2004.07.011