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Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions

✍ Scribed by J.W Klaus; S.J Ferro; S.M George

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 539 KB
Volume: 162-163
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00237-3

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