Atomic-step observation at buried SiO2Si(111) interfaces by scanning reflection electron microscopy

✍ Scribed by Heiji Watanabe; Ken Fujita; Masakazu Ichikawa

• Book ID: 117217632
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 512 KB
• Volume: 385
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(97)00347-6