Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films

✍ Scribed by Peter Klaver; Edwin Haddeman; Barend Thijsse

• Book ID: 114171128
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 604 KB
• Volume: 153
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00050-6