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Atomic oxygen densities in a downstream microwave O 2 /Ar plasma source

✍ Scribed by Ershov, Alexander; Borysow, Jacek

Book ID: 121740949
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 101 KB
Volume: 16
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/16/4/015

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