Phase separation and atomic ordering in
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F.Y. Meng; M. Rao; N. Newman; S. Mahajan
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Article
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2008
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Elsevier Science
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English
⚖ 687 KB
We studied the occurrence of phase separation and atomic ordering in quaternary In x Al y Ga 1ÀxÀy N layers by transmission electron microscopy. Three layers of different compositions were examined: one lattice-mismatched In 0.10 Al 0.02 Ga 0.88 N layer together with two lattice-matched In 0.12 Al 0