✦ LIBER ✦
Atomic level modeling of boron diffusion through silicon oxide before and after plasma nitridation
✍ Scribed by V. Zubkov; S. Aronowitz; V. Sukharev
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 112 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1369-8001
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