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Atomic level epitaxy of 3C-SiC by low pressure vapour deposition with alternating gas supply

✍ Scribed by H. Nagasawa; Y. Yamaguchi


Book ID
107864193
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
551 KB
Volume
225
Category
Article
ISSN
0040-6090

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