Atomic-layer resolved monitoring of thermal oxidation of Si(001) by reflectance difference oscillation technique

✍ Scribed by Tetsuji Yasuda; Masayasu Nishizawa; Naoto Kumagai; Satoshi Yamasaki; Hitoshi Oheda; Kikuo Yamabe

• Book ID: 113936718
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 228 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.262