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Atomic layer epitaxy of Si using atomic H

✍ Scribed by Shigeru Imai; Toshio Iizuka; Osamu Sugiura; Masakiyo Matsumura


Book ID
107864189
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
414 KB
Volume
225
Category
Article
ISSN
0040-6090

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