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Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide

✍ Scribed by Chae, Junghun; Park, Hyoung-Sang; Kang, Sang-won

Book ID: 115515858
Publisher: The Electrochemical Society
Year: 2002
Tongue: English
Weight: 244 KB
Volume: 5
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.1475199

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