✦ LIBER ✦
Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2/SiO2 Nanolaminates and Comparisons with Their Homogeneous Mixtures
✍ Scribed by L. Zhong; W. L. Daniel; Z. Zhang; S. A. Campbell; W. L. Gladfelter
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 622 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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