Atomic layer deposited titanium dioxide and its application in resonant waveguide grating

✍ Scribed by Alasaarela, T. ;Saastamoinen, T. ;Hiltunen, J. ;Säynätjoki, A. ;Tervonen, A. ;Stenberg, P. ;Kuittinen, M. ;Honkanen, S.

• Book ID: 115355265
• Publisher: The Optical Society
• Year: 2010
• Tongue: English
• Weight: 449 KB
• Volume: 49
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.49.004321