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Atomic Layer CVD in the Bi–Ti–O System

✍ Scribed by M. Schuisky; K. Kukli; M. Ritala; A. Hårsta; M. Leskelä

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 466 KB
Volume: 6
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(200006)6:3<139::aid-cvde139>3.0.co;2-t

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