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Atomic Layer Chemical Vapor Deposition of TiO[sub 2] Low Temperature Epitaxy of Rutile and Anatase

✍ Scribed by Schuisky, Mikael; Hårsta, Anders; Aidla, Aleks; Kukli, Kaupo; Kiisler, Alma-Asta; Aarik, Jaan

Book ID: 127320452
Publisher: The Electrochemical Society
Year: 2000
Tongue: English
Weight: 275 KB
Volume: 147
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1393901

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