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Atomic hydrogen etching of silicon-incorporated diamond-like carbon films prepared by pulsed laser deposition

✍ Scribed by Nakazawa, H.; Sugita, H.; Enta, Y.; Suemitsu, M.; Yasui, K.; Itoh, T.; Endoh, T.; Narita, Y.; Mashita, M.


Book ID
121381250
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
503 KB
Volume
18
Category
Article
ISSN
0925-9635

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